Ion beam sputtering of Ag – Angular and energetic distributions of sputtered and scattered particles
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference21 articles.
1. Stress relaxation and optical characterization of TiO2 and SiO2 films grown by dual ion beam deposition
2. A simple model for the formation of compressive stress in thin films by ion bombardment
3. Sputtering studies with the Monte Carlo Program TRIM.SP
4. Angular and energy dependencies of secondary ion emission from polycrystalline and single-crystal surfaces
5. Energy Distribution in Sputtering Processes
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