Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
13 articles.
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1. A New Simulation Method for 3-D Electron Beam Lithography;2023 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO);2023-07-31
2. Cross Sections of Scattering Processes in Electron-Beam Lithography;Russian Microelectronics;2023-04
3. Describing the differential inelastic inverse mean free path of PMMA polymer with the Mermin–Belkacem-Sigmund model;Indian Journal of Physics;2023-03-10
4. Scattering Mechanisms;Transport of Energetic Electrons in Solids;2023
5. New microscopic approach to e-beam lithography simulation;2020 International Conference on Information Technology and Nanotechnology (ITNT);2020-05-26