Comparison of platelet formation in hydrogen and helium-implanted silicon
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference14 articles.
1. Application of hydrogen ion beams to Silicon On Insulator material technology
2. Radiation‐Induced Cavities and Exfoliation
3. Role of integrated lateral stress in surface deformation of He‐implanted surfaces
4. A transmission electron microscopy quantitative study of the growth kinetics of H platelets in Si
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