Author:
Lovics R.,Csik A.,Takáts V.,Hakl J.,Vad K.
Funder
New Hungary Development Plan
European Social Fund
European Regional Development Fund
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
1 articles.
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1. Blistering during the atomic layer deposition of iridium;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2016-01