Nitrogen ion implantation of silicon in dense plasma focus
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference28 articles.
1. Amorphization of silicon by ion irradiation in dense plasma focus
2. Effects of nitrogen on dislocation behavior and mechanical strength in silicon crystals
3. X-ray study of silicon crystal structure changes due to implantation with fast nitrogen ions
4. Low-energy carbon and nitrogen ion implantation in silicon
5. Surface wettabiliy of nitrogen plasma-implanted silicon
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