HF/HNO3 Etching of the Saw Damage
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Publisher
Elsevier BV
Reference25 articles.
1. Experimental studies on the mechanism of wet chemical etching of silicon in HF/HNO3 mixtures;Steinert;J. Electrochem. Soc.,2005
2. Reactive species generated during wet chemical etching of silicon in HF/HNO3 mixtures;Steinert;J. Phys. Chem. B,2006
3. The effect of H2SiF6 on the surface morphology of textured multi-crystalline silicon;Weinreich;Semicond. Sci. Technol.,2006
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