Parameter identification and hysteresis compensation of embedded piezoelectric stack actuators

Author:

Juhász László,Maas Jürgen,Borovac Branislav

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Reference28 articles.

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2. A ballscrew drive mechanism with piezo-electric nut for preload and motion control;Chen;Int J Mach Tools Manuf,2000

3. Dynamic characteristics and dual control of a ball screw drive with integrated piezoelectric actuator;Fujita;Precis Eng,2010

4. A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation;Liu;J Micromech Microeng,2003

5. Nanometer precise hybrid actuator in positioning mechanism with long travel range;Glöß,2006

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