Advanced control strategy for a digital mass flow controller-Reference-Cited by-同舟云学术

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Advanced control strategy for a digital mass flow controller

Published:2009-06 Issue:4 Volume:19 Page:443-449
ISSN:0957-4158
Container-title:Mechatronics
language:en
Short-container-title:Mechatronics

Author:

Couturier Pierre

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Reference9 articles.

1. Mass-flow-controller real time process-gas delivery;Gray;Microelectron Manuf Technol,1991

2. Digital mass flow controllers come of age;Drexel;Solid State Technol,1996

3. Controlling the flow-digitally;Bernard;Cleanroom Technol,2003

4. Development, modelling and certain investigations on thermal mass flow meters;Viswanathan;Flow Meas Instrum,2002

5. A calibration system for calorimetric mass flow devices;Wildmer;The Inst Phys,1982

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. PI gain tuning for pressure-based MFCs with Gaussian mixture model;Scientific Reports;2024-09-05

2. Characteristic test methods of the thermal mass flow controller;Journal of Mechanical Science and Technology;2014-03

3. Discretization of nonlinear input-driven dynamical systems using the Adomian Decomposition Method;Applied Mathematical Modelling;2012-12

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