An unknown wafer surface defect detection approach based on Incremental Learning for reliability analysis
Author:
Funder
National Natural Science Foundation of China
Jiangsu Province Natural Science Foundation
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Safety, Risk, Reliability and Quality
Reference66 articles.
1. Out-of-distribution detection-assisted trustworthy machinery fault diagnosis approach with uncertainty-aware deep ensembles;Han;Reliab Eng Syst Saf,2022
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3. Advances in machine learning and deep learning applications towards wafer map defect recognition and classification: a review;Kim;J Intell Manuf,2022
4. Anomaly detection and diagnosis for wind turbines using long short-term memory-based stacked denoising autoencoders and XGBoost;Zhang;Reliab Eng Syst Saf,2022
5. Adaptive open set domain generalization network: Learning to diagnose unknown faults under unknown working conditions;Zhao;Reliab Eng Syst Saf,2022
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