Author:
Tönshoff H.K,Blawit C,Rie K.T,Gebauer A
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference10 articles.
1. H.K. Tönshoff, Spanen, Springer-Verlag, Berlin, 1995.
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3. Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel
4. Effect of N2-to-TiCl4 flow rate ratio on the properties of TiN coatings formed by d.c. discharge plasma-assisted chemical vapor deposition
5. Spectroscopic investigation of N2H2ArTiCl4-assisted chemical vapour deposition discharge for plasma of TiN
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