Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference7 articles.
1. R.W Moss, E.D. McClanahan Jr. and N. Laegreid, US Patent 4,038,171
2. A model of radio frequency planar discharges
3. C.K. Carniglia, in SVC 39th Annual Tech. Conf. Proceedings, p. 211.
4. Monte Carlo simulations of magnetron sputtering particle transport
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献