On the residual stress and picostructure of titanium nitride films I: Implantation with argon or krypton-Reference-Cited by-同舟云学术

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On the residual stress and picostructure of titanium nitride films I: Implantation with argon or krypton

Published:1992-11 Issue: Volume:54-55 Page:180-185
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Perry A.J.,Valvoda V.,Rafaja D.,Williamson D.L.,Sartwell B.D.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference47 articles.

1. Lattice images of inert gas bubbles in aluminium

2. Residual stress and the effect of implanted argon in films of zirconium nitride made by physical vapor deposition

3. Pressure of Neon, Argon, and Xenon Bubbles in Aluminum

4. Evidence for solid krypton bubbles in copper, nickel and gold at 293K

Cited by 34 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion implantation of copper oxide thin films; statistical and experimental results;Surfaces and Interfaces;2020-03

2. Effects of nitrogen and argon ion implantations on surface morphology, microstructure, and mechanical properties of Ti-Al-N coatings;AIP Conference Proceedings;2017

3. Friction and wear reduction of hard TiAlSiN coatings by an integrated approach of laser surface texturing and high-energy ion implantation;Surface and Coatings Technology;2014-11

4. First-principles study of rare gas incorporation in titanium nitride;Physical Review B;2013-01-08

5. Effects of carbon and nitrogen ion implantations on surface and tribological properties of Ti–Al–Si–N coatings;Surface Engineering;2012-03

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