Plasma-based ion implantation utilising a cathodic arc plasma-Reference-Cited by-同舟云学术

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Plasma-based ion implantation utilising a cathodic arc plasma

Published:2002-07 Issue:1-3 Volume:156 Page:136-142
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Bilek M.M.M,McKenzie D.R,Tarrant R.N,Lim S.H.M,McCulloch D.G

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference18 articles.

1. Metal plasma immersion ion implantation and deposition using vacuum arc plasma sources;Anders;J. Vac. Sci. Technol. B,1994

2. Molecular dynamics study of thin-film deposition;Muller;J. Vac. Sci. Technol. A,1988

3. Plasma source ion implantation technique for surface modification of materials;Conrad;J. Appl. Phys.,1987

4. Model of plasma immersion ion implantation;Lieberman;J. Appl. Phys.,1989

5. Plasma immersion ion implantation;Mantese;Mater. Res. Soc. Bull.,1996

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