Author:
Nishimura Yoshimi,Chayahara Akiyoshi,Horino Yuji,Yatsuzuka Mitsuyasu
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference4 articles.
1. Repetitively pulsed metal ion beams for ion implantation
2. Plasma source ion‐implantation technique for surface modification of materials
3. Ion-plasma surface modification technologies at ONRI, Proc. IEEJ Workshop on Plasma, Kyoto, PST-00-64;Horino,2000
4. RF (13.56 MHz) superposed HV pulse PBII and deposition, Proc. Plasma Sci. Sym., Kyoto;Nishimura,2001
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