Internal stress reduction by incorporation of silicon in diamond-like carbon films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Influence of reactant gas composition on selected properties of N-doped hydrogenated amorphous carbon films
2. Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films
3. PREPARATION, PROPERTIES AND STRUCTURE OF METAL CONTAINING AMORPHOUS HYDROGENATED CARBON FILMS
4. Characterization of silicon-stabilized amorphous hydrogenated carbon
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