Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materials-Reference-Cited by-同舟云学术

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Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materials

Published:1998-05 Issue: Volume:103-104 Page:268-275
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Knapp J.A,Follstaedt D.M,Myers S.M,Barbour J.C,Friedmann T.A,Ager J.W,Monteiro O.R,Brown I.G

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference18 articles.

1. Precipitate-hardened aluminum alloys formed using pulsed laser deposition

2. Mechanical Properties of High Strength Aluminum Alloys Formed by Pulsed Laser Deposition

3. Finite-element modeling of nanoindentation for determining the mechanical properties of implanted layers and thin films

4. Evaluating Mechanical Properties of Thin Layers using Nanoindentation and Finite-Element Modeling: Implanted Metals and Deposited Layers

5. Hardening of Nickel Alloys by Ion Implantation of Titanium and Carbon

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1. Nanoindentation-based characterization of micromechanical properties of greenish mudstone from deep Fushun West open-pit mine (Fushun city, China);Geomechanics and Geophysics for Geo-Energy and Geo-Resources;2022-03-17

2. Pile-up response of polymer thin films to static and dynamic loading;Thin Solid Films;2019-05

3. Estimating the Modulus and Yield Strength of the Top-Layer Film on Multilayer BEOL Stacks;IEEE Transactions on Device and Materials Reliability;2018-09

4. Determination of material properties of thin films and coatings using indentation tests: a review;Journal of Materials Science;2017-07-17

5. Yield Maps for Single and Bilayer Thin Films Under Scratch;Journal of Tribology;2016-04-21

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