1. The International Roadmap for Devices and Systems;Badaroglu,2022
2. Review of semiconductor flash memory devices for material and process issues;Kim;Adv. Mater.,2022
3. Near-field infrared nanoscopic study of EUV- and e-beam-exposed hydrogen silsesquioxane photoresist;Kim;Nano Converg.,2022
4. 5nm CMOS production technology platform featuring full-fledged EUV, and high mobility channel FinFETs with densest 0.021μm2 SRAM cells for mobile SoC and high performance computing applications;Yeap;Tech. Dig. - Int. Electron Devices Meet. IEDM. 2019-Decem,2019
5. Three-dimensional 128 Gb MLC vertical nand flash memory with 24-WL stacked layers and 50 MB/s high-speed programming;Park;IEEE J. Solid State Circ.,2015