Fabrication of multi-scale structures with multiple X-ray masks and synchrotron hard X-ray irradiations
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference22 articles.
1. State of the Art on Micromilling of Materials, a Review
2. A review on the conventional and micro-electrodischarge machining of tungsten carbide
3. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
4. AFM-measured surface roughness of SU-8 structures produced by deep x-ray lithography
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1. A molybdenum nanostructured-film target for tunable x-ray sources: surface-structure controllable preparing and radiation intensity selecting;Physica Scripta;2023-07-05
2. Fabrication of Oblique Submicron-Scale Structures Using Synchrotron Hard X-ray Lithography;Polymers;2021-03-26
3. Manufacturing of multiscale structured surfaces;CIRP Annals;2020
4. Development of oriented metallic patterns using LIGA process for focused anti-scatter grid application;Japanese Journal of Applied Physics;2019-05-22
5. Fabrication of Polymer Microstructures of Various Angles via Synchrotron X-Ray Lithography Using Simple Dimensional Transformation;Materials;2018-08-17
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