Precursor gas composition optimisation for large area boron doped nano-crystalline diamond growth by MW-LA-PECVD
Author:
Funder
Czech Science Foundation
Czech Academy of Sciences
Publisher
Elsevier BV
Subject
General Chemistry,General Materials Science
Reference33 articles.
1. Growth and characterization of P-Doped n-type diamond thin films;Koizumi;Phys. Status Solidi (a),1999
2. Very high growth rate chemical vapor deposition of single-crystal diamond;Yan;PNAS,2002
3. Schreck M, Gsell S, Brescia R and Fischer M. Ion bombardment induced buried lateral growth: the key mechanism for the synthesis of single crystal diamond wafers. Sci. Rep. 7:44462 | https://doi.org/10.1038/srep44462
4. http://www.neocoat.ch.
5. Low resistivity p+ diamond (100) films fabricated by hot-filament chemical vapor deposition;Ohmagari;Diam. Relat. Mater.,2015
Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films;Acta Materialia;2024-01
2. Surface morphology-assisted electrochemical conversion of carbon dioxide to formic acid via nanocrystalline boron-doped diamond electrodes;Chemical Engineering Journal;2023-10
3. Low temperature growth of nanocrystalline diamond: Insight thermal property;Diamond and Related Materials;2023-08
4. The influence of droplet-based seeding of nanodiamond particles on the morphological, optical, and mechanical properties of diamond coatings on glass;Surface and Coatings Technology;2023-04
5. New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition;Diamond and Related Materials;2022-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3