Growth of self-aligned carbon nanotube for use as a field-effect transistor using cobalt silicide as a catalyst
Author:
Publisher
Elsevier BV
Subject
General Chemistry,General Materials Science
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1. Enhanced straylight suppression of short carbon nanotubes by using Platinum silicide catalyst enhancer in rapid thermal chemical vapor deposition process;Applied Surface Science;2022-03
2. Transition metal silicides: fundamentals, preparation and catalytic applications;Catalysis Science & Technology;2019
3. Variable electron beam diameter achieved by a titanium oxide/carbon nanotube hetero-structure suitable for nanolithography;Nanotechnology;2013-01-11
4. Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication;Journal of Applied Physics;2012-03-15
5. Study on transport characteristics of CNTFET with HALO-LDD doping structure based on NEGF quantum theory;Acta Physica Sinica;2012
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