1. Silicon as a mechanical material;Petersen;Proc. IEEE,1982
2. Analog Devices—ADXL50—Datasheet. Available from: https://www.analog.com/en/products/adxl50.html#product-overview
3. T. Kvisterøy, From Research to Industry, ResearchGate. [Online]. Available from: 2005.
4. Polymer microoptoelectromechanical systems: accelerometers and variable optical attenuators;Cadarso;Sens. Actuators, Phys.,2008
5. Electromagnetically force balanced polymer accelerometer;Li;Microsyst. Technol. Micro Nanosyst. Inf. Storage Process. Syst.,2013