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MEMS reliability

  • Published:2020 Issue: Volume: Page:851-876
  • ISSN:
  • Container-title:Handbook of Silicon Based MEMS Materials and Technologies
  • language:
  • Short-container-title:

Author:

Skogström Lasse,Li Jue,Mattila Toni T.,Vuorinen Vesa

Publisher

Elsevier

Reference171 articles.

1. ISO 26262, Road Vehicles – Functional Safety, 2018.

2. IEC 61508, Functional Safety of Electrical/Electronic/Programmable Electronic Safety-Related Systems, 2010.

3. Interfacial Compatibility in Microelectronics.;Laurila,2012

4. F.T. Hartley, S. Arney, F. Sexton, Chapter 09: Microsystems reliability, test and metrology, in: ITRS, 2001, pp. 337–394.

5. A.A. Walraven, Failure mechanisms in MEMS, in: Proceedings of IEEE International Test Conference (ITC), Charlotte, NC, 2003, pp. 828–833.

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4. An Analytical Model of Transient Response of MEMS under High-G shock for Reliability Assessment;2022 IEEE International Reliability Physics Symposium (IRPS);2022-03

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