Influence of deposition parameters on the dielectric properties of rf magnetron sputtered Ba(ZrxTi1−x)O3 thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Ceramics and Composites
Reference22 articles.
1. Conduction mechanisms in BaTiO3 thin films;Li;Phys. Rev.,1991
2. Pulsed excimer laser ablated barium titanate thin films;Ray;Appl. Phys. Lett.,1992
3. Electrical conductivity of sputtered films of strontium titanate;Gerblinger;J. Appl. Phys.,1990
4. Structural and electrical characterization of SrTiO3 thin films prepared by metal organic chemical vapor deposition;Yamaguchi;Jpn. J. Appl. Phys. 1,1993
5. Dielectric properties of SrTiO3 capacitor using TiN bottom electrode and effects of SrTiO3 film thickness;Abe;Jpn. J. Appl. Phys. 1,1997
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