On the post-contamination effect on the delamination of sputtered amorphous carbon nitride films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry
Reference25 articles.
1. Delamination of Compressed Thin Films
2. Mode-dependent toughness and the delamination of compressed thin films
3. Atomic force microscopy study of the morphological shape of thin film buckling
4. Determination of thin-film debonding parameters from telephone-cord measurements
5. The morphology and folding patterns of buckling-driven thin-film blisters
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