The characteristics of the high- Er2O3 (erbium oxide) dielectrics deposited on polycrystalline silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Thin inter-polyoxide films for flash memories grown at low temperature (400/spl deg/C) by oxygen radicals
2. Deposited inter-polysilicon dielectrics for nonvolatile memories
3. Oxide Grown on Polycrystal Silicon by Rapid Thermal Oxidation in N[sub 2]O
4. Atomic Layer Deposition of Lanthanum Oxide Films for High-κ Gate Dielectrics
5. Praseodymium silicate formed by postdeposition high-temperature annealing
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