Granular-composite-like electrical transport properties of polycrystalline cubic TaN x thin films prepared by rf sputtering method-Reference-Cited by-同舟云学术

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Granular-composite-like electrical transport properties of polycrystalline cubic TaN x thin films prepared by rf sputtering method

Published:2018-09 Issue: Volume:279 Page:34-38
ISSN:0038-1098
Container-title:Solid State Communications
language:en
Short-container-title:Solid State Communications

Author:

Li Ran,Duan Xiu-Zhi,Zhu Xin,Yang Yang,Zhou Ding-Bang,Li Zhi-Qing

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,General Chemistry

Reference42 articles.

1. Epitaxial NaCl structure δ-TaNx(001): Electronic transport properties, elastic modulus, and hardness versus N/Ta ratio

2. Synthesis and properties of tantalum nitride films formed by ion beam assisted deposition

3. Tantalum‐based diffusion barriers in Si/Cu VLSI metallizations

4. Adhesion and reliability of copper interconnects with Ta and TaN barrier layers

5. Effect of annealing temperature on structural and electrical properties of tantalum nitride thin film resistors deposited on SiO[sub 2]∕Si substrates by dc sputtering technique

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Factors facilitating and restraining the adoption of fintech neo banking platforms in India: A literature review approach;APPLIED DATA SCIENCE AND SMART SYSTEMS;2023

2. Transport properties of polycrystalline TaN_x thin films prepared by DC reactive magnetron sputtering method;PROG SUPERCOND CRYOG;2021

3. Effects of Nitrogen Flow Rate on the Structural, Morphological and Optical Properties of TaN Thin Films Grown by the DC Magnetron Sputtered Technique;Acta Physica Polonica A;2019-12

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