Wafer-level detection of organic contamination by ZnO-rGO hybrid-assisted laser desorption/ionization time-of-flight mass spectrometry

Author:

Kim Kookjoo,Um Kiju,Yoon Cheolsang,Ryoo Won Sun,Lee Kangtaek

Funder

National Research Foundation of Korea

Publisher

Elsevier BV

Subject

Analytical Chemistry

Reference33 articles.

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5. K. Saga, T. Hattori, Characterization of trace organic contamination on silicon surfaces in semiconductor manufacturing, in: Proceedings of the ALTECH 2003 Anal. Diagn. Tech. Semicond. Mater., Devices, Processes 2003, 2003-03, pp. 136–149.

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