Development of a Silicon-based Nanoprobe System for 3-D Measurements-Reference-Cited by-同舟云学术

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Development of a Silicon-based Nanoprobe System for 3-D Measurements

Published:2001 Issue:1 Volume:50 Page:365-368
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Haitjema H.,Pril W.O.,Schellekens P.H.J.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference9 articles.

1. Accuracy limitations of fast mechanical probing;van Vliet;Annals of the CIRP,1996

2. Development of a 2D probing system with nanometer resolution;Pril,1997

3. Design for a compact High-Accuracy CMM;Peggs;Annals of the CIRP,1999

4. Design of a nanometer capacative probe;Lu,1999

5. Design of a probe system for CMM measurements with nanometre accuracy;Pril,2001

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