Electrochemical nanoimprint lithography directly on n-type crystalline silicon (111) wafer-Reference-Cited by-同舟云学术

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Electrochemical nanoimprint lithography directly on n-type crystalline silicon (111) wafer

Published:2017-02 Issue: Volume:75 Page:1-4
ISSN:1388-2481
Container-title:Electrochemistry Communications
language:en
Short-container-title:Electrochemistry Communications

Author:

Zhang Lin,Zhang Jie,Yuan Ding,Han Lianhuan,Zhou Jian-Zhang,Tian Zhao-Wu,Tian Zhong-Qun,Zhan Dongping

Funder

National Natural Science Foundation of China

State Key Laboratory for Manufacturing Systems Engineering (Xi'an Jiaotong University)

Publisher

Elsevier BV

Subject

Electrochemistry

Reference22 articles.

1. Porous silicon optical devices for sensing applications;Torres-Costa;Opt. Mater.,2005

2. Porous silicon-based optical biosensors and biochips;Rendina;Physica E: Low-dim. Syst. Nanostruct.,2007

3. Recent developments in silicon optoelectronic devices;Wong;Microelectron. Reliab.,2002

4. Ag-mediated charge transport during metal-assisted chemical etching of silicon nanowires;Geyer;ACS Appl. Mater. Interfaces,2013

5. Layer-by-layer assembly of nanowires for three-dimensional, multifunctional electronics;Javey;Nano Lett.,2007

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1. CMOS-compatible electrochemical nanoimprint: High throughput fabrication of ordered microstructures on semiconductor wafer by using a glassy carbon mold;Electrochimica Acta;2023-09

2. Ultrasonic‐Assisted Electrochemical Nanoimprint Lithography: Forcing Mass Transfer to Enhance the Localized Etching Rate of GaAs;Chemistry – An Asian Journal;2023-08-09

3. Confined Etchant Layer Technique: An Electrochemical Approach to Micro-/Nanomachining;The Journal of Physical Chemistry C;2023-07-06

4. Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures;Reports of China’s Basic Research;2023

5. Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography;Science China Chemistry;2022-03-15

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