Self-consistent charging in dielectric films under defocused electron beam irradiation-Reference-Cited by-同舟云学术

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Self-consistent charging in dielectric films under defocused electron beam irradiation

Published:2011-07 Issue:5 Volume:42 Page:443-448
ISSN:0968-4328
Container-title:Micron
language:en
Short-container-title:Micron

Author:

Li Wei-Qin,Mu Kun,Xia Rong-Hou

Funder

Doctor Research Start Fund of Xi’an University of Technology

Publisher

Elsevier BV

Subject

Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science

Reference35 articles.

1. Charging and discharging of electron beam resist films;Bai;J. Vac. Sci. Technol. B,1999

2. Transient measurement of resist charging during electron beam exposure;Bai;J. Vac. Sci. Technol. B,2003

3. Analysis of two methods of measurement of surface potential of insulators in SEM: X-ray spectroscopy methods;Belhaj;Appl. Surf. Sci.,2001

4. Electron probe microanalysis of insulating materials: quantification problems and some possible solutions;Cazaux;X-Ray Spectrom.,1996

5. Scenario for time evolution of insulator charging under various focused electron irradiations;Cazaux;J. Appl. Phys.,2004

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3. Controlling the surface potential of a dielectric target irradiated by an electron beam in medium vacuum;Vacuum;2021-05

4. Electron-beam deposition of magneto-dielectric coatings in the forevacuum pressure range;Vacuum;2021-02

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