Evaluation of doping profiles from capacitance measurements
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. W. Zwijsen, unpublished
2. C. van Opdorp, J. appl. Phys. (to be published)
3. Ion Drift in an n‐p Junction
4. Impurity Distribution in Epitaxial Silicon Films
5. The capacitance of p-n junctions
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