Author:
Cao Huiliang,Li Hongsheng,Liu Jun,Shi Yunbo,Tang Jun,Shen Chong
Funder
Preresearch Fund
Jiangsu Province Science-Technology Support Plan
China National Science Fund for Distinguished Young Scholars of China
National Defense 973 Fund
Subject
Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering
Reference22 articles.
1. Structural dynamics of microsystems-current state of research and future directions;Lin;Mech. Syst. Signal Process.,2006
2. Micromechanical Transducers – Pressure Sensors, Accelerometers, and Gyroscope;Bao,2000
3. Reliability- and performance-based robust design optimization of MEMS structures considering technological uncertainties;Martowicz;Mech. Syst. Signal Process.,2012
4. Noise in MEMS;Mohd-Yasin;Meas. Sci. Technol.,2010
5. Dynamic identification of electrostatically actuated MEMS in the frequency domain;Pasquale;Mech. Syst. Signal Process.,2012
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