Experimental investigation of shaping disturbance observer design for motion control of precision mechatronic stages with resonances

Author:

Yang Jin,Hu Chuxiong,Zhu Yu,Wang Ze,Zhang Ming

Funder

National Nature Science Foundation of China

Autonomous Scientific Research Project of Tsinghua University

Publisher

Elsevier BV

Subject

Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering

Reference20 articles.

1. Development of flank wear model of cutting tool by using adaptive feedback linear control system on machining AISI D2 steel and AISI 4340 steel;Orra;Mech. Syst. Signal Process.,2016

2. Online machining error estimation method of numerical control gear grinding machine tool based on data analysis of internal sensors;Zhao;Mech. Syst. Signal Process.,2016

3. Position control in lithographic equipment;Butler;IEEE Control Syst. Mag.,2011

4. A time-varying Q-filter design for iterative learning control with application to an ultra-precision dual-stage actuated wafer stage;Yu;Proc. Inst. Mech. Eng., Part I: J. Syst. Contr. Eng.,2014

5. Synchronization analysis and control of three eccentric rotors in a vibrating system using adaptive sliding mode control algorithm;Kong;Mech. Syst. Signal Process.,2016

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