Towards a high bias voltage MEMS filter using electrostatic levitation-Reference-Cited by-同舟云学术

Towards a high bias voltage MEMS filter using electrostatic levitation

Published:2021-03 Issue: Volume:150 Page:107250
ISSN:0888-3270
Container-title:Mechanical Systems and Signal Processing
language:en
Short-container-title:Mechanical Systems and Signal Processing

Author:

Pallay Mark^ORCID,Miles Ronald N.,Towfighian Shahrzad^ORCID

Publisher

Elsevier BV

Subject

Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering

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