Dataset of ptychographic X-ray computed tomography of inverse opal photonic crystals produced by atomic layer deposition-Reference-Cited by-同舟云学术

Dataset of ptychographic X-ray computed tomography of inverse opal photonic crystals produced by atomic layer deposition

Published:2018-12 Issue: Volume:21 Page:1924-1936
ISSN:2352-3409
Container-title:Data in Brief
language:en
Short-container-title:Data in Brief

Author:

Furlan Kaline P.,Larsson Emanuel^ORCID,Diaz Ana,Holler Mirko,Krekeler Tobias,Ritter Martin,Petrov Alexander Yu.,Eich Manfred,Blick Robert,Schneider Gerold A.,Greving Imke,Zierold Robert,Janßen Rolf

Funder

German Research Foundation, Germany

Publisher

Elsevier BV

Subject

Multidisciplinary

Reference27 articles.

1. Photonic materials for high-temperature applications: synthesis and characterization by X-ray ptychographic tomography;Furlan;Appl. Mater. Today.,2018

2. Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3);Gorham;Appl. Phys. Lett.,2014

3. Investigation of silicon oxide thin films prepared by atomic layer deposition using SiH2Cl2 and O3 as the precursors;Lee;Jpn. J. Appl. Phys.,2004

4. The dependence of hardness on the density of amorphous alumina thin films by PECVD;Wang;Thin Solid Films,1997

5. Highly porous α-Al2O3 ceramics obtained by sintering atomic layer deposited inverse opals;Furlan;Ceram. Int.,2017

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