Author:
Hudek P.,Borkowicz Z.,Kostic I.,Rangelow I.W.,Kassing R.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. SPIE Vol. 1392;Pilz;Advanced techiniques for IC processing,1990
2. Nano-resolution tri-level process by down-stream-microwave RF-biased etching;Rangelow,1991
3. Plasma treated spin-on-glass for submicron tri-level lithography;Borkowicz,1991
4. Surface science aspects of etching reactions;Winters;Surface Science Reports,1992
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献