Author:
Aristov V.V.,Borsenko T.B.,Kudryashov V.A.,Svintsov A.A.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. X-ray lithography
2. Photoelectron exposure of x-ray resists
3. Proceedings of the First International Conference on Electron-Beam Technologies;Borsenko,1985
4. Modeli Besporyadka;Zayman,1982
Cited by
2 articles.
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