A simple bilayer lift-off process-Reference-Cited by-同舟云学术

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A simple bilayer lift-off process

Published:1990-04 Issue:1-4 Volume:11 Page:549-552
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Witman David F.,Shaw Jane M.,Hatzakis Michael,Babich Edward D.,Paraszczak Jurij R.,Stewart Kevin J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Single-Step Optical Lift-Off Process

2. AVS Proceedings of the 32nd International Symposium On Electron, Ion and Photon Beams;Shaw,1989

3. Proc. of Microcircuit Engineering Conference;Poniez,1984

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thick-film MEMS thermoelectric sensor fabricated using a thermally assisted lift-off process;Journal of Micro/Nanolithography, MEMS, and MOEMS;2016-06-09

2. Bilayer lift-off process for aluminum metallization;Journal of Micro/Nanolithography, MEMS, and MOEMS;2015-01-20

3. Modification of photoresist profile in lift-off process for MEMS application;Nano- and Microtechnology: Materials, Processes, Packaging, and Systems;2002-11-01

4. Thin-film imaging: Past, present, prognosis;IBM Journal of Research and Development;1997-01

5. A four-level VLSI bipolar metallization design with chemical-mechanical planarization;IBM Journal of Research and Development;1992-09

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