Author:
Tang T.T.,Li S.C.,Wang H.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Low aberration in-lens analyzer for e-beam tester using collimation by both magnetic and electrostatic lenses;Microelectronic Engineering;1995-02
2. Secondary electron energy analyzers for electron-beam testing;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1990-12
3. Electron-optical components for E-beam testing;Microelectronic Engineering;1990-05