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Sheath structure and ion current onto a patterned surface immersed in a plasma at floating potential

  • Published:2002-10 Issue:2-3 Volume:160 Page:259-268
  • ISSN:0257-8972
  • Container-title:Surface and Coatings Technology
  • language:en
  • Short-container-title:Surface and Coatings Technology

Author:

Briehl Boris,M. Urbassek Herbert

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference25 articles.

1. Principles of Plasma Discharges and Materials Processing;Lieberman,1994

2. Low Energy Ion-Surface Interactions;Marton,1994

3. Ion-Solid Interactions: Fundamentals and Applications;Nastasi,1996

4. Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions;Rossnagel,1990

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1. Numerical Modeling of Floating Electrodes in a Plasma Processing System;Applied Science and Convergence Technology;2015-07-30

2. Sputtering from swift-ion trails in LiF: A hybrid PIC/MD simulation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-11

3. Hybrid particle-in-cell/molecular dynamics simulation of swift-ion tracks in LiF;Physical Review B;2013-06-21

4. Numerical simulation of pulsed plasma sheath dynamics around a micro-sized tip;Journal of Plasma Physics;2013-05-03

5. Erratum to “Sheath structure and ion current onto a patterned surface immersed in a plasma at floating potential”;Surface and Coatings Technology;2003-11
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