CNx coatings deposited by pulsed RF supersonic plasma jet: hardness, nitrogenation and optical properties-Reference-Cited by-同舟云学术

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CNx coatings deposited by pulsed RF supersonic plasma jet: hardness, nitrogenation and optical properties

Published:2001-07 Issue: Volume:142-144 Page:681-687
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Hubicka Z.,Šı́cha M.,Pajasová L.,Soukup L.,Jastrabı́k L.,Chvostová D.,Wagner T.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference18 articles.

1. The mechanical, tribological and optical properties of CNx coatings prepared by sputtering methods

2. CNx coatings sputtered by DC magnetron: hardness, nitrogenation and optical properties

3. Role of nitrogen in the formation of hard and elasticCNxthin films by reactive magnetron sputtering

4. Structural Properties of Amorphous Carbon Nitride Films Prepared by Reactive RF-Magnetron Sputtering

5. Reactive magnetron sputter deposition of CNx films on Si(001) substrates: film growth, microstructure and mechanical properties

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1. Spatial Distribution of Plasma Parameters in DC-Energized Hollow Cathode Plasma Jet;Contributions to Plasma Physics;2010-09

2. Preparation of carbon nitride films by DC arc plasma jet CVD;Diamond and Related Materials;2006-04

3. Investigation of the RF pulse modulated plasma jet system during the deposition of Pb(ZrxTi1−x)O3 thin films on polymer substrates;Surface and Coatings Technology;2005-10

4. Deposition of PZT Thin Films on Polymer Substrate by Means of Low Pressure Plasma Jet System;Ferroelectrics;2005-07

5. Rf Hollow Cathode Plasma Jet Depopsition of BaxSR1-XTI03 Films;MRS Proceedings;2005

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