Polymer oxidation downstream from oxygen microwave plasmas-Reference-Cited by-同舟云学术

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Polymer oxidation downstream from oxygen microwave plasmas

Published:1992-01 Issue:2 Volume:35 Page:181-192
ISSN:0141-3910
Container-title:Polymer Degradation and Stability
language:en
Short-container-title:Polymer Degradation and Stability

Author:

Matienzo L.J.,Egitto F.D.

Publisher

Elsevier BV

Subject

Materials Chemistry,Polymers and Plastics,Mechanics of Materials,Condensed Matter Physics

Reference32 articles.

1. Principles of Electronic Packaging;Schmitt,1989

2. Gas plasma effects on polymer surfaces

3. Chemical characterization of resist surface exposed to plasma and UV/ozone ambients;Yanazawa,1983

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