Author:
Pan GuoShun,Gu ZhongHua,Zhou Yan,Li Tuo,Gong Hua,Liu Yan
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics
Reference21 articles.
1. Semiconductor Materials Fundamentals of Semiconductor Fabrication;May,2004
2. Properties of Semiconductor Materials and Chemicals Microchip Fabrication;Van Zant,2000
3. Effect of ingredients in slurry containing alumina on chemical mechanical polishing of hard disc substrate;Sun;Journal of Engineering Tribology: Part J,2009
4. Optimisation of the epi-ready semi-insulating gas wafer preparation procedure;Dominika;Vacuum,2004
5. Cu/Barrier CMP on porous low-k based interconnect schemes;Gottfried;Microelectronic Engineering,2006
Cited by
44 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献