Probing the interaction range of electron beam-induced etching in STEM by a non-contact electron beam
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Published:2024-11
Issue:
Volume:265
Page:114019
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ISSN:0304-3991
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Container-title:Ultramicroscopy
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language:en
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Short-container-title:Ultramicroscopy
Author:
Noisternig Stefan ManuelORCID,
Rentenberger Christian,
Gammer Christoph,
Karnthaler H. Peter,
Kotakoski Jani
Funder
Austrian Science Fund