Real-time monitoring of ellipsometry monolayer oscillations during metalorganic vapor-phase epitaxy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference18 articles.
1. Real-time optical diagnostics for epitaxial growth
2. Surface science at atmospheric pressure: Reconstructions on (001) GaAs in organometallic chemical vapor deposition
3. Investigation of the Decomposition Process of Ga Organometals in MOCVD by the Surface Photo-Absorption Method
4. Atomic layer epitaxy on (001) GaAs: Real-time spectroscopy
5. In-situ monitoring of In0.5Ga0.5As quantum dot formation during metalorganic vapor phase epitaxy by fast-nulling ellipsometry
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