Gravity-related transport process in off-axis sputtering deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference13 articles.
1. Ultra-Smooth ZnO Buffer Layers on (001) Sapphire
2. HighTcthin films with roughness smaller than one unit cell
3. Insitugrowth and properties of single‐crystalline‐like La2−xSrxCuO4epitaxial films by off‐axis sputtering
4. Uniform deposition of YBa2Cu3O7 thin films over an 8 inch diameter area by a 90° off‐axis sputtering technique
5. Pressure effect on YBa2Cu3O7 thin film growth in off‐axis radio frequency magnetron sputtering
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Off-axis growth of AlN thin films by hollow cathode magnetron sputtering under various nitrogen concentrations;Diamond and Related Materials;2007-04
2. Improvement of thickness uniformity and crystallinity of AlN films prepared by off-axis sputtering;Vacuum;2006-05
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