Author:
Deng E.,Wong H.,Cheung N.W.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Two-dimensional implantation profile simulator — RETRO;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04
2. Two-dimensional implantation profile simulator – RETRO;Ion Implantation Technology–92;1993
3. Megaelectronvolt implantations in silicon very-large-scale integration;Materials Science and Engineering: B;1989-02
4. Buried dopant and defect layers for device structures with high-energy ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
5. Transverse straggling of MeV oxygen ions implanted in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1988-02