Author:
Kawai T.,Naitoh M.,Nogami M.,Kinoyama T.,Nagai N.,Fujisawa H.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Priorities of cathode and anode contaminations in triggering the short-pulsed voltage breakdown in vacuum;IEEE Transactions on Dielectrics and Electrical Insulation;2006-02
2. The Nissin PR-80A high current ion implantation system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
3. Wafer chargeup study on the PR-80 high current ion implantation machine;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
4. New computer control system for the high current ion implanter PR-80;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02