Author:
Kinomura A.,Andoh H.,Takai M.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
6 articles.
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1. Characterization of dopant profiles produced by ultra-shallow As implantation and spike annealing using medium energy ion scattering;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2004-06
2. Development of enhanced depth-resolution technique for shallow dopant profiles;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-05
3. Detectors for microbeam applications at medium ion energy;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-07
4. Application of medium energy nuclear microprobe to semiconductor process steps;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-09
5. Analytical techniques in nuclear microprobes;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09