Iron gettering and doping in silicon due to MeV carbon implantation-Reference-Cited by-同舟云学术

Iron gettering and doping in silicon due to MeV carbon implantation

Published:1993-04 Issue:1-2 Volume:74 Page:70-74
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Skorupa W.,Kögler R.,Schmalz K.,Gaworzewski P.,Morgenstern G.,Syhre H.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference9 articles.

1. Symp. C on High Energy Implantation;Tsukamoto,1991

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